RF Generator 維修
|
Advanced Energy |
RFG3001 |
RFG2KV |
RFG1250 |
PDX1400 |
|
ENI/MKS |
GHW-25 |
GHW-50 |
GHW-55 |
NOVA-50 |
|
Daihen |
AGA-25 |
WGA-50 |
AGA-55 |
|
| Advanced Energy | AZX／Navlgator／Dresster VM／Fixed Match／RFX |
| ENI／MKS | MW／MWD／MWM／MWH Series |
| Trazar | AMU 10D／AMU 10E／AMU 2／AMU 4／RFDS |
| Daihen | RMN 20, 50, 75, 100／AMN 50／WMN 50 |
| RF Services | RFS 3019／RFS 3016／RFS 1000 |
| Applied Materials | P5000／Centura／dps Source Blas／HDP／PVD／CVD |
| Lam Research | DSQ／Top Match／Lam 9400／Lam 9600 Series |
| Others | Kyosan 5KW／PSK Auto Match／Air Capacitors |
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